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Electrical reliability of parylene films for device passivationHigh purity pinhole free films /parylene/ applicability as barrier coating to keep semiconductor surface free from moisture, ions and contaminants
Document ID
19700050279
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Lee, S. M.
Licari, J. J.
Litant, I.
Date Acquired
August 5, 2013
Publication Date
March 1, 1970
Subject Category
Physics, Solid-State
Accession Number
70A26395
Funding Number(s)
CONTRACT_GRANT: NAS12-2011
Distribution Limits
Public
Copyright
Other

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