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The measurement of thin film thicknesses in normally inaccessible locations with the scanning electron microscopeThickness measurement for thin films in inaccessible locations using scanning electron microscope, comparing accuracy with interferometric techniques
Document ID
19700056319
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Anstead, R. J.
Floyd, S. R.
Date Acquired
August 5, 2013
Publication Date
June 1, 1970
Subject Category
Instrumentation And Photography
Accession Number
70A32435
Distribution Limits
Public
Copyright
Other

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