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Evaporant source for vapor deposition PatentSpatter proof evaporant source design for use in vacuum deposition of solid thin films on substrates
Document ID
19710010920
Acquisition Source
Legacy CDMS
Document Type
Other - Other
Authors
Adams, G. D. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
August 6, 2013
Publication Date
September 9, 1969
Subject Category
Machine Elements And Processes
Report/Patent Number
Patent Number: NASA-CASE-XMF-06065
Patent Application Number: US-PATENT-APPL-SN-665679
Patent Number: US-PATENT-3,466,424
Accession Number
71N20395
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-XMF-06065|US-PATENT-3,466,424
Patent Application
US-PATENT-APPL-SN-665679

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