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Method and apparatus for detecting gross leaks PatentVolume displacement transducer for leak detection in hermetically sealed semiconductor devices
Document ID
19710017196
Acquisition Source
Legacy CDMS
Document Type
Other - Other
Authors
Orner, J. W. (NASA Electronics Research Center Cambridge, MA, United States)
Date Acquired
August 6, 2013
Publication Date
February 2, 1971
Subject Category
Instrumentation And Photography
Report/Patent Number
Patent Number: US-PATENT-3,559,460
Patent Application Number: US-PATENT-APPL-SN-801660
Patent Number: NASA-CASE-ERC-10033
Accession Number
71N26672
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-3,559,460|NASA-CASE-ERC-10033
Patent Application
US-PATENT-APPL-SN-801660

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