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Orifice gross leak tester PatentTest chambers with orifice and helium mass spectrometer for detecting leak rate of encapsulated semiconductor devices
Document ID
19710019516
Acquisition Source
Legacy CDMS
Document Type
Other - Other
Authors
Altshuler, T. L. (NASA Electronics Research Center Cambridge, MA, United States)
Date Acquired
August 6, 2013
Publication Date
May 18, 1971
Subject Category
Instrumentation And Photography
Report/Patent Number
Patent Number: NASA-CASE-ERC-10150
Patent Application Number: US-PATENT-APPL-SN-822519
Patent Number: US-PATENT-3,578,758
Accession Number
71N28992
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-ERC-10150|US-PATENT-3,578,758
Patent Application
US-PATENT-APPL-SN-822519

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