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Microchemical surface analysis by electron spectroscopyAuger electron velocity analyzer for use with scanning electron microscope to identify low concentrations of elements on surfaces of semiconductor devices
Document ID
19710024895
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 6, 2013
Publication Date
July 26, 1971
Subject Category
Instrumentation And Photography
Report/Patent Number
NASA-CR-111968
Report Number: NASA-CR-111968
Accession Number
71N34371
Funding Number(s)
CONTRACT_GRANT: NGR-30-011-096
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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