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Low stress integral coverslips
Low stress integral coverslips deposition by high vacuum ion beam sputtering for solar cell manufacturing cost reduction
Document ID
19710035381
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Bartels, F. T. C.
Kirkpatrick, A. R.
Tripoli, G. A.
Date Acquired
August 6, 2013
Publication Date
January 1, 1970
Publication Information
Publisher:
INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, INC.,
Subject Category
Auxiliary Systems
Meeting Information
Meeting:
PHOTOVOLTAIC SPECIALISTS CONFERENCE
Location:
SEATTLE, WA
Start Date:
August 4, 1970
End Date:
August 6, 1970
Sponsors:
INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS
Accession Number
71A16078
Funding Number(s)
CONTRACT_GRANT: NAS5-10236
Distribution Limits
Public
Copyright
Other
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