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Use a SEM on a production lineScanning electron microscope for poor metallization detection in manufacturing cycle of semiconductor devices
Document ID
19710057822
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Adolphsen, J. W.
Anstead, R. J.
Date Acquired
August 6, 2013
Publication Date
January 1, 1971
Publication Information
Publisher: INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS, INC.,
Subject Category
Electronic Equipment
Meeting Information
Meeting: ANNUAL SYMPOSIUM ON RELIABILITY PHYSICS
Location: LAS VEGAS, NV
Start Date: April 7, 1970
End Date: April 10, 1970
Sponsors: IEEE
Accession Number
71A38519
Distribution Limits
Public
Copyright
Other

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