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Vapor-phase growth of several III-V compound semiconductorsCrystal growth of III-V compound semiconductors from vapor phase, studying deposition processes chemistry by mass spectrometry
Document ID
19710059519
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Ban, V. S.
Enstrom, R. E.
Richman, D.
Tietjen, J. J.
Date Acquired
August 6, 2013
Publication Date
October 1, 1971
Subject Category
Physics, Solid-State
Meeting Information
Meeting: SYMPOSIUM ON NEW DEVELOPMENTS IN FILM AND DEVICE FABRICATION
Location: YORKTOWN HEIGHTS, NY
Start Date: May 18, 1971
Sponsors: AMERICAN VACUUM SOCIETY
Accession Number
71A40216
Funding Number(s)
CONTRACT_GRANT: NAS1-2538
CONTRACT_GRANT: DAAB07-69-C-0145
Distribution Limits
Public
Copyright
Other

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