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Metallization systems for semiconductor devicesMetals and systems for semiconductor devices metallization, evaluating conductivity, adhesion, contact resistance, deposition ease, electrochemical corrosion, reliability and stability
Document ID
19710060105
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Terry, L. E.
Wilson, R. W.
Date Acquired
August 6, 2013
Publication Date
January 1, 1971
Publication Information
Publisher: WESTERN PERIODICALS CO.,
Subject Category
Electronic Equipment
Meeting Information
Meeting: WESTERN ELECTRONIC SHOW AND CONVENTION
Location: SAN FRANCISCO, CA
Country: US
Start Date: August 24, 1971
End Date: August 27, 1971
Sponsors: WESTERN ELECTRONIC MANUFACTURERS ASSN., INST. OF ELECTRICAL AND ELECTRONICS ENGINEERS
Accession Number
71A40802
Funding Number(s)
CONTRACT_GRANT: NAS12-132
Distribution Limits
Public
Copyright
Other

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