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Sputtering and ion platingThe proceedings of a conference on sputtering and ion plating are presented. Subjects discussed are: (1) concepts and applications of ion plating, (2) sputtering for deposition of solid film lubricants, (3) commercial ion plating equipment, (4) industrial potential for ion plating and sputtering, and (5) fundamentals of RF and DC sputtering.
Document ID
19720017820
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Date Acquired
September 2, 2013
Publication Date
January 1, 1972
Subject Category
Machine Elements And Processes
Report/Patent Number
NASA-SP-5111
Report Number: NASA-SP-5111
Accession Number
72N25470
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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