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A thin film, high sensitivity, two terminal, semiconductor strain sensor.A two terminal semiconductor strain sensor which makes use of an evaporated piezoelectric layer to modulate the forward current-voltage characteristics of a thin film diode is described. The physical mechanisms are discussed and compared to other types of semiconductor sensors. Application to the electromechanical design of ultraminiature pressure transducers is discussed.
Document ID
19720037259
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Authors
Mallon, J. R. (Kulite Semiconductor Products, Inc. Ridgefield, N.J., United States)
Date Acquired
August 6, 2013
Publication Date
January 1, 1971
Subject Category
Instrumentation And Photography
Meeting Information
Meeting: Instrument Society of America, Annual Conference
Location: Chicago, IL
Start Date: October 4, 1971
End Date: October 7, 1971
Accession Number
72A20925
Funding Number(s)
CONTRACT_GRANT: NAS2-5739
Distribution Limits
Public
Copyright
Other

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