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Laser scanner for testing semiconductor chipsIndividual ''fingerprint'' signals are produced when system photoexcites chips. ''Fingerprints'' are analyzed for characteristics associated with defects, including many not visible to the naked eye. Electromagnetic radiation photogenerates free electrons and holes in semiconductor chip. These carriers produce electrical signals at terminals. Signals vary depending on what defects are present.
Document ID
19730000327
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Hall, T. C. (Hughes Aircraft Co.)
Date Acquired
August 7, 2013
Publication Date
October 1, 1973
Subject Category
Electronic Systems
Report/Patent Number
MFS-22693
Report Number: MFS-22693
Accession Number
73B10327
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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