Piston manometer as an absolute standard for vacuum-gage calibration in the range 2 to 500 millitorr

A thin disk is suspended, with very small annular clearance, in a cylindrical opening in the base plate of a calibration chamber. A continuous flow of calibration gas passes through the chamber and annular opening to a downstream high vacuum pump. The ratio of pressures on the two faces of the disk is very large, so that the upstream pressure is substantially equal to net force on the disk divided by disk area. This force is measured with a dynamometer that is calibrated in place with dead weights. A probable error of + or - (0.2 millitorr plus 0.2 percent) is attainable when downstream pressure is known to 10 percent.