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Semiconductor surface protection materialA method and a product for protecting semiconductor surfaces is disclosed. The protective coating material is prepared by heating a suitable protective resin with an organic solvent which is solid at room temperature and converting the resulting solution into sheets by a conventional casting operation. Pieces of such sheets of suitable shape and thickness are placed on the semiconductor areas to be coated and heat and vacuum are then applied to melt the sheet and to drive off the solvent and cure the resin. A uniform adherent coating, free of bubbles and other defects, is thus obtained exactly where it is desired.
Document ID
19730021800
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Packard, R. D.
(NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
September 2, 2013
Publication Date
July 10, 1973
Subject Category
Materials, Nonmetallic
Report/Patent Number
Patent Number: US-PATENT-3,745,082
Patent Number: NASA-CASE-ERC-10339-1
Patent Application Number: US-PATENT-APPL-SN-43883
Accession Number
73N30532
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-3,745,082|NASA-CASE-ERC-10339-1
Patent Application
US-PATENT-APPL-SN-43883
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