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Resistivity of doped polycrystalline silicon films.
Document ID
19730032943
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Fripp, A. L. (NASA Langley Research Center Hampton, Va., United States)
Slack, L. H. (Virginia Polytechnical Institute and State University Blacksburg, Va., United States)
Date Acquired
August 7, 2013
Publication Date
January 1, 1973
Publication Information
Publication: Electrochemical Society
Subject Category
Physics, Solid-State
Accession Number
73A17745
Distribution Limits
Public
Copyright
Other

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