In situ transfer standard for ultrahigh vacuum gage calibration

A compact insitu calibration assembly, for ultrahigh vacuum gauges is described. The system depends on the repeatable generation of a specific gas pressure by the dissociation of a solid solution chemical compound when subjected to a given temperature. A precise temperature measurement is related to the pressure generated within the vacuum by the properties of the solid solution compound. this accurately establishes the gas pressure which in turn is used to calibrate a vacuum gauge. Also included is a metering orifice used in the calibration system and which is made movable to facilitate the degassing bakeout required in ultrahigh vacuum devices.