A follow-on study for miniature solid-state pressure transducer

The activities of a developmental program to design, fabricate and test an absolute pressure transducer based upon the piezojunction properties of silicon are summarized. The prime problem addressed is the development of a housing capable of applying the high stress levels needed for sensitive piezojunction operation but at the same, free from the creep effects and the fragility that limit the usefulness of previous designs. The first part of the report describes the initial fabrication and test and reviews the theory of sensor performance. The second part incorporates two recommendations of the first part (the use of commercially manufactured silicon planar mesa diodes and the adoption of an all-silicon structure for loading) and presents some preliminary test data on the transducers thus fabricated. These initial measurements show much improved performance over any previously fabricated piezojunction transducers but testing is incomplete and several problems in manufacturing technology remain.