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Electronmicroscopic evidence for a columnar-void-type structure in sputtered NbN films
Document ID
19740037647
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
doi:10.1063/1.1663003
Authors
Wagner, W.
Ast, D. (Cornell University Ithaca, N.Y., United States)
Gavaler, J. R. (Westinghouse Research Laboratories Pittsburgh, Pa., United States)
Date Acquired
August 7, 2013
Publication Date
January 1, 1974
Publication Information
Publication: Journal of Applied Physics
Volume: 45
Subject Category
Physics, Solid-State
Accession Number
74A20397
Distribution Limits
Public
Copyright
Other

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