The oxidation of titanium films saturated with nitrogen at 300 K

In a two-chamber system designed for physical adsorption studies, a titanium film was deposited and exposed to nitrogen. Oxygen was then admitted into the system. However, the presence of oxygen could not be detected by the mass spectrometer during the first 300 seconds of oxygen admission. On the basis of the data it is assumed that the capture probability of the nitrogen-saturated titanium film for oxygen is very nearly 1. Based on this assumption, the titanium film adsorbed approximately 3 monolayers of oxygen.