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Microcircuit testing and fabrication, using scanning electron microscopesScanning electron microscopes are used to determine both user-induced damages and manufacturing defects subtle enough to be missed by conventional light microscopy. Method offers greater depth of field and increased working distances.
Document ID
19750000304
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Nicolas, D. P.
Date Acquired
August 8, 2013
Publication Date
December 1, 1975
Subject Category
Electronic Components And Circuits
Report/Patent Number
MFS-23159
Report Number: MFS-23159
Accession Number
75B10304
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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