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Method of forming aperture plate for electron microscopeAn electron microscope is described with an electron source a condenser lens having either a circular aperture for focusing a solid cone of electrons onto a specimen or an annular aperture for focusing a hollow cone of electrons onto the specimen. It also has objective lens with an annular objective aperture, for focusing electrons passing through the specimen onto an image plane. A method of making the annular objective aperture using electron imaging, electrolytic deposition and ion etching techniques is included.
Document ID
19750004660
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Heinemann, K.
(NAS-NRC)
Date Acquired
September 3, 2013
Publication Date
November 12, 1974
Subject Category
Optics
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-374424
Patent Number: NASA-CASE-ARC-10448-2
Patent Number: US-PATENT-3,847,689
Accession Number
75N12732
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-ARC-10448-2|US-PATENT-3,847,689
Patent Application
US-PATENT-APPL-SN-374424
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