Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Wydeven, T. (Tegal Corp.) Date Acquired
August 8, 2013
Publication Date
August 1, 1976
Publication Information
Publication: NASA Tech Briefs
Volume: 1
Issue: 2
ISSN: 0145-319X
Report/Patent Number
Report Number: ARC-10915ISSN: 0145-319XARC-10915 Accession Number
76B10201
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.