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IGFET/SOI fabrication methodTechnique increases switching speeds, shortens channel length, reduces parasitic capacitance and gate overlap, and minimizes gate-to-channel capacitance. The p and n sections may be reversed, allowing fabrication of complementary devices.
Document ID
19760000259
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Feltner, W. R.
Date Acquired
August 8, 2013
Publication Date
August 1, 1976
Publication Information
Publication: NASA Tech Briefs
Volume: 1
Issue: 2
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
MFS-23312
Report Number: MFS-23312
ISSN: 0145-319X
Accession Number
76B10259
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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