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Measuring scatter angle from mirrorsTwo instrumentation systems are used to measure scatter angle: intensity scatterometer makes small angle measurements on order of 10 arc-minutes; amplitude scatterometer, which uses interferometric principle, measures smaller angles on order of 10 arc-seconds. Both scatterometers use laser sources and can measure into ultraviolet (0.325 micron) wavelengths.
Document ID
19760000342
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Date Acquired
August 8, 2013
Publication Date
January 1, 1977
Publication Information
Publication: NASA Tech Briefs
Volume: 1
Issue: 3
ISSN: 0145-319X
Subject Category
Physical Sciences
Report/Patent Number
MFS-23421
Report Number: MFS-23421
ISSN: 0145-319X
Accession Number
76B10342
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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