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Modeling of fluidized bed silicon deposition processThe model is intended for use as a means of improving fluidized bed reactor design and for the formulation of the research program in support of the contracts of Silicon Material Task for the development of the fluidized bed silicon deposition process. A computer program derived from the simple modeling is also described. Results of some sample calculations using the computer program are shown.
Document ID
19770021637
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Kim, K.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Hsu, G.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Lutwack, R.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
PRATURI A. K.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
September 3, 2013
Publication Date
June 15, 1977
Subject Category
Energy Production And Conversion
Report/Patent Number
NASA-CR-154120
JPL-PUBL-77-25
Report Number: NASA-CR-154120
Report Number: JPL-PUBL-77-25
Accession Number
77N28581
Funding Number(s)
CONTRACT_GRANT: NAS7-100
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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