Problems in photoresponse distribution measurement

Photoresponse distribution measurement by scanning a light spot across the surface of a semiconductor device is examined. The technqiue is used for solar cell characterization because the measured quantity is the direct expression of the distribution of the desired performance of the device. An apparatus for measuring the photoresponse distribution was set and used in the development of polysilicon thin film solar cells. A schmeatic diagram of the apparatus and an example of measurement are shown.