Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Gilmour, A. S., Jr. (New York, State University Buffalo, N.Y., United States) Date Acquired
August 9, 2013
Publication Date
December 1, 1976
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 13
Subject Category
Electronics And Electrical Engineering Accession Number
77A34104
Distribution Limits
Public