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Multiple-sample holder for IC testingCarrousel tray speeds up testing process by feeding mass spectrometer up to 12 sealed integrated circuit packages in rapid succession for analysis of contaminants and total gas composition.
Document ID
19780000540
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Haack, R. F.
Date Acquired
August 9, 2013
Publication Date
March 1, 1979
Publication Information
Publication: NASA Tech Briefs
Volume: 3
Issue: 4
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
NPO-14314
ISSN: 0145-319X
Report Number: NPO-14314
Accession Number
78B10540
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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