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Photomask and pattern programming manualA user's manual for a set of computer programs written in FORTRAN for the layout and generation of photomasks is presented. A limited amount of related information on photomasks, their design, and use is included. Input to the programs includes data describing the photomask design. Possible outputs include plots of the layout and a magnetic tape for controlling generation of the photomask by a pattern generator.
Document ID
19780012862
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Kirschman, R. K. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
September 3, 2013
Publication Date
March 1, 1978
Subject Category
Computer Programming And Software
Report/Patent Number
JPL-PUB-77-32
NASA-CR-156131
Report Number: JPL-PUB-77-32
Report Number: NASA-CR-156131
Accession Number
78N20805
Funding Number(s)
CONTRACT_GRANT: NAS7-100
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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