NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login

Press Enter or click the Search button to begin your search.

Back to Results
Lift-off procedure improves pattern definitionLayer of TiO2, economically deposited during integrated circuit fabrication, allows "nonpattern" metal to be removed cleanly.
Document ID
19790000287
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Hovel, H. J. (IBM Corp.)
Huggins, H. A. (IBM Corp.)
Date Acquired
August 10, 2013
Publication Date
December 1, 1979
Publication Information
Publication: NASA Tech Briefs
Volume: 4
Issue: 2
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
LAR-12392
ISSN: 0145-319X
Report Number: LAR-12392
Accession Number
79B10287
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Available Downloads

There are no available downloads for this record.

Related Records

There are no records associated with this record.
No Preview Available