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Design rules for CMOS/SOS circuitsReport presents design rules for advanced-technology integrated circuits made by self-aligned silicongate complementary - metal - oxide - semiconductor/silicon-on-sapphir (CMOS/SOS) process.
Document ID
19790000430
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Date Acquired
August 10, 2013
Publication Date
April 1, 1980
Publication Information
Publication: NASA Tech Briefs
Volume: 4
Issue: 3
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
MFS-25132
ISSN: 0145-319X
Report Number: MFS-25132
Accession Number
79B10430
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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