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Rate equation for desorbing particlesA rate equation describing the desorption of particles from substrates has been formulated using a simple classical model in terms of the particulate escape probabilities and escape velocities. Numerical results for desorption rates as a function of temperature using simple two-body potentials are calculated for various metallic systems. These results were obtained for the low coverage limits and are found to be in good agreement with experimental findings. The present formulation also provides an improved picture of the physical nature of the commonly discussed parameters, such as the frequency factor, desorption energy, and desorption temperature in relation to observed desorption phenomena.
Document ID
19790041091
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Halicioglu, T.
(NASAStanford, Joint Institute for Surface and Microstructural Research, Moffett Field Calif., United States)
Date Acquired
August 9, 2013
Publication Date
February 1, 1979
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 16
Subject Category
Inorganic And Physical Chemistry
Accession Number
79A25104
Distribution Limits
Public
Copyright
Other

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