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Silicon nitride passivation of IC'sFeasibility study looks at effectiveness of silicon nitride passivation coating against moisture and mobile ions. Coating was tested on CMOS microcircuits. Tests included temperature cycling, high-temperature electrical stress, and temperature and humidity exposure. Report concludes plastic-encapsulated circuits with protective coating exhibit high survival rates; it includes tables summarizing test results and figures that show effects of flexing.
Document ID
19800000279
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Erickson, J. J. (Hughes Aircraft Co.)
Gebhart, F. L. (Hughes Aircraft Co.)
Hall, T. C. (Hughes Aircraft Co.)
Peters, J. W. (Hughes Aircraft Co.)
Date Acquired
August 10, 2013
Publication Date
September 1, 1980
Publication Information
Publication: NASA Tech Briefs
Volume: 5
Issue: 2
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
MFS-25309
Report Number: MFS-25309
ISSN: 0145-319X
Accession Number
80B10279
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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