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Bulk lifetime indicates surface contaminationIndirect measurement of wafer surface impurities has sensitivity of 300 monolayers. Photoconductivity-decay apparatus determines bulk recombination lifetime in semiconductor materials. Bulk impurity levels before and after annealing relate to level of surface contamination. Method evaluates wafer cleaning techniques, qualifying purity of chemical and deionized water used, or monitors production process.
Document ID
19800000511
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Blais, P. D. (Westinghouse Electric Corp.)
Date Acquired
August 10, 2013
Publication Date
April 1, 1981
Publication Information
Publication: NASA Tech Briefs
Volume: 5
Issue: 4
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
ISSN: 0145-319X
Report Number: NPO-14966
NPO-14966
Accession Number
80B10511
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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