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Plasma etching of poly/N,N'-/p,p'- oxydiphenylene/pyromellitimide/ film and photo/thermal degradation of etched and unetched film
Document ID
19800039988
Acquisition Source
Legacy CDMS
Document Type
Other - Collected Works
Authors
Wydeven, T. (NASA Ames Research Center Moffett Field, CA, United States)
Johnson, C. C. (NASA Ames Research Center Moffett Field, CA, United States)
Golub, M. A. (NASA Ames Research Center Moffett Field, CA, United States)
Hsu, M. S. (NASA Ames Research Center Moffett Field, CA, United States)
Lerner, N. R. (NASA Ames Research Center Moffett Field, Calif., United States)
Date Acquired
August 10, 2013
Publication Date
January 1, 1979
Subject Category
Nonmetallic Materials
Accession Number
80A24158
Distribution Limits
Public
Copyright
Other

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