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Thin-film coatingsThin, adherent, high density films are discussed with respect to their application in two plasma physics techniques (ion plating and sputtering). The operation of each technique is described as well as what surfaces can be coated, and what kind of materials can be applied. The effects of these films on the mechanical properties of solid surfaces are also discussed.
Document ID
19810004472
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Buckley, D. H. (NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 11, 2013
Publication Date
November 1, 1980
Publication Information
Publication: Impact of the 80's: Proc. of a Conf. on Selected Technol. for Business and Ind.
Subject Category
Metallic Materials
Accession Number
81N12983
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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