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Ion plating for the futureThe ion plating techniques are classified relative to the instrumental set up, evaporation media, and mode of transport. A distinction is drawn between the low vacuum (plasma) and high vacuum (ion beam) techniques. Ion plating technology is discussed at the fundamental and industrial level. At the fundamental level, the capabilities and limitations of the plasma (evaporant flux) and film characteristics are evaluated. And on the industrial level, the performance and potential uses of ion plated films are discussed.
Document ID
19810016654
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Spalvins, T.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
September 4, 2013
Publication Date
January 1, 1981
Subject Category
Metallic Materials
Report/Patent Number
NASA-TM-82630
E-884
Report Number: NASA-TM-82630
Report Number: E-884
Meeting Information
Meeting: Ann. Tech. Conf. of the Soc. of Vacuum Coaters
Location: Dearborn, MI
Country: United States
Start Date: May 12, 1981
End Date: May 14, 1981
Accession Number
81N25189
Funding Number(s)
PROJECT: RTOP 506-53-12
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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