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Large area silicon sheet by EFGA multiple growth run with three 10 cm cartridges was carried out with the best throughput rates and time percentage of simultaneous three ribbon growth achieved to date in this system. Growth speeds were between 3.2 and 3.6 cm/minute on all three cartridges and simultaneous full width growth of three ribbons was achieved 47 percent of the time over the eight hour duration of the experiment. Improvements in instrumentation and in the main zone temperature uniformity were two factors that have led to more reproducible growth conditions in the multiple ribbon furnace.
Document ID
19810016960
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
September 4, 2013
Publication Date
May 29, 1981
Subject Category
Energy Production And Conversion
Report/Patent Number
DOE/JPL-954355-81/17
NASA-CR-164449
Report Number: DOE/JPL-954355-81/17
Report Number: NASA-CR-164449
Accession Number
81N25496
Funding Number(s)
CONTRACT_GRANT: JPL-954355
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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