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Liner for Silicon ReactorCoating of sodium tetrafluoride minimizes contaminating high-purity silicon during removal from reactor chamber. Using an NaF liner, reaction products are removed by simply turning reactor chamber updside down. Liner acts as seeding agent for NaF formed during reaction and insulates nickel walls from hot reaction products.
Document ID
19820000168
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Sanjurjo, A. (SRI International)
Date Acquired
August 10, 2013
Publication Date
March 1, 1983
Publication Information
Publication: NASA Tech Briefs
Volume: 7
Issue: 1
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-15366
ISSN: 0145-319X
Report Number: NPO-15366
Accession Number
82B10168
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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