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Modified Silicon Furnace Lowers Crystal CostModified Czochralski setup grows several large crystals in succession from one crucible. Modified apparatus is expected to reduce cost per crystal by about 50 percent. Key features are: isolation valve between growth and pulling chamber, and recharging mechanism. Functional changes reduce cycle time and prolong crucible life.
Document ID
19820000216
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Lane, R. L.
(Kayex, Corp.)
Date Acquired
August 10, 2013
Publication Date
March 1, 1983
Publication Information
Publication: NASA Tech Briefs
Volume: 7
Issue: 1
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-15041
Report Number: NPO-15041
ISSN: 0145-319X
Accession Number
82B10216
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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