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Scriber for silicon wafersA device for dividing silicon wafers into rectangular chips is characterized by a base including a horizontally oriented bed with a planar support surface, a vacuum chuck adapted to capture a silicon wafer seated on the support for translation in mutually perpendicular directions. A stylus support mounted on the bed includes a shaft disposed above and extended across the bed and a truck mounted on the shaft and supported thereby for linear translation along a path extended across the bed a vertically oriented scribe has a diamond tip supported by the truck also adapted as to engage a silicon wafer captured by the chuck and positioned beneath it in order to form score lines in the surface of the wafer as linear translation is imparted to the truck. A chuck positioning means is mounted on the base and is connected to the chuck for positioning the chuck relative to the stylus.
Document ID
19820003596
Acquisition Source
Legacy CDMS
Document Type
Other - Patent Application
Authors
Yamakawa, K. A.
(JPL California Inst. of Technology, Pasadena, United States)
Fortier, E. P.
(JPL California Inst. of Technology, Pasadena, United States)
Date Acquired
September 4, 2013
Publication Date
September 18, 1981
Subject Category
Mechanical Engineering
Report/Patent Number
Patent Application Number: US-PATENT-APPL-SN-303670
Patent Number: NASA-CASE-NPO-15539-1
Accession Number
82N11469
Funding Number(s)
CONTRACT_GRANT: NAS7-100
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-NPO-15539-1
Patent Application
US-PATENT-APPL-SN-303670
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