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Liquid immersion apparatus for minute articlesApparatus is disclosed for immersing minute integrated circuit chips in an etching solution in manufacturing integrated circuits during research and development. The apparatus includes a holder, having a handle and basket support for carrying a removable unitary basket and lid structure where fluid flow-through passages are formed, and wherein graduated openings in the handle provide for adjustably supporting the basket in a breaker at a desired level.
Document ID
19820004568
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Belcher, J. G., Jr. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Hollis, B. R., Jr. (NASA Marshall Space Flight Center Huntsville, AL, United States)
Date Acquired
September 4, 2013
Publication Date
September 1, 1981
Subject Category
Mechanical Engineering
Report/Patent Number
Patent Number: US-PATENT-4,286,542
Patent Application Number: US-PATENT-APPL-SN-171933
Patent Number: NASA-CASE-MFS-25363-1
Accession Number
82N12441
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
US-PATENT-4,286,542|NASA-CASE-MFS-25363-1
Patent Application
US-PATENT-APPL-SN-171933

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