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Float zone space processing rationaleThe role of float zone silicon in integrated circuits is surveyed. The problem of oxygen thermal donors and their inhomogeneous distribution is predicted to be a critical issue.
Document ID
19820018461
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Jastrzebski, L. (Radio Corp. of America Princeton, NJ, United States)
Date Acquired
August 10, 2013
Publication Date
September 1, 1981
Publication Information
Publication: NASA. Marshall Space Flight Center Float Zone Workshop
Subject Category
Astronautics (General)
Accession Number
82N26337
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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IDRelationTitle19820018454Collected WorksFloat Zone Workshop
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