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Development and fabrication of a solar cell junction processing systemDevelopment of a pulsed electron beam subsystem, wafer transport system, and ion implanter are discussed. A junction processing system integration and cost analysis are reviewed. Maintenance of the electron beam processor and the experimental test unit of the non-mass analyzed ion implanter is reviewed.
Document ID
19820018905
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Banker, S. (Spire Corp. Bedford, MA, United States)
Date Acquired
September 4, 2013
Publication Date
January 1, 1982
Subject Category
Energy Production And Conversion
Report/Patent Number
NASA-CR-169036
DOE/JPL-955640-81/8
QPR-8
JPL-9950-678
NAS 1.26:169036
QR-10073-08
Report Number: NASA-CR-169036
Report Number: DOE/JPL-955640-81/8
Report Number: QPR-8
Report Number: JPL-9950-678
Report Number: NAS 1.26:169036
Report Number: QR-10073-08
Accession Number
82N26781
Funding Number(s)
CONTRACT_GRANT: JPL-955640
CONTRACT_GRANT: NAS7-100
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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