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Refractory coatings and method of producing the sameThe adhesion, friction, and wear properties of sputtered refractory coatings on substrates of materials that form stable nitrides is improved by placing each substrate directly below a titanium carbide target of a commercial radiofrequency diode apparatus in a vacuum chamber. Nitrogen is bled into the system through a nozzle resulting in a small partial pressure of about 0.5% to 2.5% during the first two minutes of deposition. The flow of nitrogen is then stopped, and the sputtering ambient is reduced to pure argon through a nozzle without interrupting the sputtering process. When nitrogen is deliberately introduced during the crucial interface formation, some of the titanium at the interface reacts to form titanium nitride while the metal of the substrate also forms the nitride. These two nitrides atomically mixed together in the interfacial region act to more strongly bond the growing titanium carbide coating as it forms on the substrate.
Document ID
19820021539
Acquisition Source
Legacy CDMS
Document Type
Other - Patent
Authors
Brainard, W. A.
(NASA Lewis Research Center Cleveland, OH, United States)
Wheeler, D. R.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
September 4, 2013
Publication Date
June 22, 1982
Subject Category
Metallic Materials
Report/Patent Number
Patent Number: NASA-CASE-LEW-13169-1
Patent Application Number: US-PATENT-APPL-SN-102003
Patent Number: US-PATENT-4,336,117
Accession Number
82N29415
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
Patent
NASA-CASE-LEW-13169-1|US-PATENT-4,336,117
Patent Application
US-PATENT-APPL-SN-102003
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