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Optical Testing of Integrated CircuitsOptical spot-raster scanner produces weighted photoresponse image (PI) of operating CMOS IC. Digital analysis of PI's, which correlates differences in PI's with electrical behavior of IC, shows promise both as 100-percent screening method for use in IC manufacture and as diagnostic tool in IC development.
Document ID
19830000508
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Erickson, J. (Hughes Aircraft Co.)
Date Acquired
August 11, 2013
Publication Date
November 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 2
ISSN: 0145-319X
Subject Category
Electronic Components And Circuits
Report/Patent Number
ISSN: 0145-319X
Report Number: MFS-25498
MFS-25498
Accession Number
83B10508
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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