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Improved Hollow CathodeImproved hollow cathode for neutral-beam injector ion sources rapidly started by dielectric breakdown of ignitor plug located at one end of open ended tube. Used in low-current ion implantation, milling, sputtering, and bombardment for surface treatment.
Document ID
19830000555
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Aston, G. (CALTECH)
Date Acquired
August 11, 2013
Publication Date
November 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 2
ISSN: 0145-319X
Subject Category
Physical Sciences
Report/Patent Number
Report Number: NPO-15560
ISSN: 0145-319X
NPO-15560
Accession Number
83B10555
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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