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Processes for VLSI CircuitsFour-volume document reviews key technologies for interconnecting in very-large-scale integrated (VLSI) circuits. Document also discusses current and proposed research into novel fabrication techniques for interconnections.
Document ID
19830000708
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Wade, T. E. (Mississippi State University)
Date Acquired
August 11, 2013
Publication Date
December 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 2
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
MFS-25857
Report Number: MFS-25857
ISSN: 0145-319X
Accession Number
83B10708
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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