NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Union Carbide Corp. polysilicon status and plansThe status of polysilicon activities is summarized highlighted by moving the silane portion of the experimental process system development unit (EPSDU) to Washougal, Washington. The completion and operation of the silane EPSDU, is discussed along with research on the silane-to-silicon deposition process. Progress on the dichlorosilane process is also reported.
Document ID
19830002238
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Leipold, M. H.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 11, 2013
Publication Date
April 1, 1982
Publication Information
Publication: Flat Plate Solar Array Proj.: Proc. of the 20th Proj. Integration Meeting
Subject Category
Energy Production And Conversion
Accession Number
83N10508
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
No Preview Available